[en] An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used.
The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8h-1.
Disciplines :
Physical, chemical, mathematical & earth Sciences: Multidisciplinary, general & others
Author, co-author :
Bazu, Marius; IMT - Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest
Gălăţeanu, Lucian; IMT- Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest
Ilian, Virgil Emil; IMT- Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest
Loicq, Jerôme ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Habraken, Serge ; Université de Liège - ULiège > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège)
Collette, Jean-Paul ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Language :
English
Title :
RELIABILITY ACCELERATED TESTING OF MEMS ACCCELEROMETERS
Publication date :
2007
Event name :
IEEE CAS
Audience :
International
Journal title :
IEEE Sensors Journal
ISSN :
1530-437X
eISSN :
1558-1748
Publisher :
Institute of Electrical and Electronics Engineers, New York, United States - New York
T. Bajenescu, M. Bazu, Reliability of Electronic Components, Springer Verlag Heidelberg, 1999.
D. Tanner et al., MEMS reliability in a vibration environment., Proceedings of IEEE International Reliability Physics Symposium, San Jose, CA, pp. 139-145, April 10-13, 2000.
A. Sharma, A. Teverovski, Evaluation of Thermo-Mechanical Stability of COTS Dual-Axis MEMS Accelerometers for Space Applications, Report about Component Technologies and Radiation Effects (Code 562), Electrical Systems Center, August 2000.
H. Shea, Relability of MEMS for space applications, Proc. of SPIE, 6111, 61110A-1, 2006.
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