[en] An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used.
The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8h-1.
Disciplines :
Physical, chemical, mathematical & earth Sciences: Multidisciplinary, general & others
Author, co-author :
Bazu, Marius; IMT - Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest
Gălăţeanu, Lucian; IMT- Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest
Ilian, Virgil Emil; IMT- Bucharest > National Institute for R&D in Microtechnologies –IMT-Bucharest
Loicq, Jerôme ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Habraken, Serge ; Université de Liège - ULiège > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège)
Collette, Jean-Paul ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Language :
English
Title :
RELIABILITY ACCELERATED TESTING OF MEMS ACCCELEROMETERS
Publication date :
2007
Event name :
IEEE CAS
Audience :
International
Journal title :
IEEE Sensors Journal
ISSN :
1530-437X
eISSN :
1558-1748
Publisher :
Institute of Electrical and Electronics Engineers, New York, United States - New York
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