Paper published in a book (Scientific congresses and symposiums)
Investigating Fused Silica Bending Strength and Damping Characteristics on Resonators Fabricated through Femtosecond Laser-Assisted Wet Etching: An Experimental Analysis
Amez-Droz, Loïc; Tunon de Lara, Matéo; Amorosi, Anthonyet al.
2024 • In Proceedings of MARSS 2024 - 7th International Conference on Manipulation, Automation, and Robotics at Small Scales
Amez-Droz, Loïc ; Université de Liège - ULiège > Aérospatiale et Mécanique (A&M)
Tunon de Lara, Matéo; UMONS - Université de Mons [BE]
Amorosi, Anthony ; Université de Liège - ULiège > Aérospatiale et Mécanique (A&M)
Lambert, Pierre; ULB - Université Libre de Bruxelles [BE]
Caucheteur, Christophe; UMONS - Université de Mons [BE]
Collette, Christophe ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Active aerospace structures and advanced mechanical systems
Language :
English
Title :
Investigating Fused Silica Bending Strength and Damping Characteristics on Resonators Fabricated through Femtosecond Laser-Assisted Wet Etching: An Experimental Analysis
Publication date :
2024
Event name :
MARSS2024
Event organizer :
TU Delft & ULB
Event place :
Delft, Netherlands
Event date :
01/07/2024 - 05/07/2024
By request :
Yes
Audience :
International
Main work title :
Proceedings of MARSS 2024 - 7th International Conference on Manipulation, Automation, and Robotics at Small Scales
Publisher :
IEEE Xplore, Piscataway, United States - New Jersey
Y.Bellouard, A.Champion, B.Lenssen, M.Matteucci, A.Schaap, M.Beresna, C.Corbari, M.Gecevičius, P.Kazansky, and O.Chappuis, “The femtoprint project,” Journal of Laser Micro/Nanoengineering, vol.7, no.1, pp.1-10, 2012.
Y.Bellouard, A.A.Said, and P.Bado, “Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica,” Optics Express, vol.13, no.17, pp.6635-6644, 2005.
B.Lenssen and Y.Bellouard, “Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching,” Applied Physics Letters, vol.101, no.10, p.103503, 2012.
S.I.Nazir and Y.Bellouard, “Contactless optical packaging concept for laser to fiber coupling,” IEEE Transactions on Components, Packaging and Manufacturing Technology, vol.11, no.6, pp.1035-1043, 2021.
M.Zanaty, T.Fussinger, A.Rogg, A.Lovera, D.Lambelet, I.Vardi, T.J.Wolfensberger, C.Baur, and S.Henein, “Programmable multistable mechanisms for safe surgical puncturing,” Journal of Medical Devices, vol.13, no.2, 2019.
L.Tissot-Daguette, C.Baur, A.Bertholds, P.Llosas, and S.Henein, “Design and modelling of a compliant constant-force surgical tool for objective assessment of ossicular chain mobility,” in 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).IEEE, 2021, Conference Proceedings, pp.1299-1302.
M.Tunon de Lara, L.Amez-Droz, K.Chah, P.Lambert, C.Collette, and C.Caucheteur, “Femtosecond pulse laser-engineered glass flexible structures instrumented with an in-built bragg grating sensor,” Optics Express, vol.31, no.18, pp.29 730-29 743, 2023.
L.Amez-Droz, M.Tunon de Lara, C.Collette, C.Caucheteur, and P.Lambert, “Instrumented flexible glass structure: A bragg grating inscribed with femtosecond laser used as a bending sensor,” Sensors, vol.23, no.19, p.8018, 2023.
Y.Bellouard, “On the bending strength of fused silica flexures fabricated by ultrafast lasers,” Optical Materials Express, vol.1, no.5, pp.816-831, 2011.
K.Numata, S.Otsuka, M.Ando, and K.Tsubono, “Intrinsic losses in various kinds of fused silica,” Classical and Quantum Gravity, vol.19, no.7, p.1697, 2002.
V.Tielen and Y.Bellouard, “Three-dimensional glass monolithic micro-flexure fabricated by femtosecond laser exposure and chemical etching,” Micromachines, vol.5, no.3, pp.697-710, 2014.
C.-E.Athanasiou, M.-O.Hongler, and Y.Bellouard, “Unraveling brittle-fracture statistics from intermittent patterns formed during femtosecond laser exposure,” Physical Review Applied, vol.8, no.5, p.054013, 2017.
S.Henein, “Conception des structures articulées à guidages flexibles de haute précision,” EPFL,” Report, 2000.
R.Christian, “The theory of oscillating-vane vacuum gauges,” Vacuum, vol.16, no.4, pp.175-178, 1966.
M.Bao, H.Yang, H.Yin, and Y.Sun, “Energy transfer model for squeeze-film air damping in low vacuum,” Journal of Micromechanics and Microengineering, vol.12, no.3, p.341, 2002.
H.Hosaka, K.Itao, and S.Kuroda, “Damping characteristics of beam-shaped micro-oscillators,” Sensors and Actuators A: Physical, vol.49, no.1-2, pp.87-95, 1995.
S.Bianco, M.Cocuzza, S.Ferrero, E.Giuri, G.Piacenza, C.Pirri, A.Ricci, L.Scaltrito, D.Bich, and A.Merialdo, “Silicon resonant mi-crocantilevers for absolute pressure measurement,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, vol.24, no.4, pp.1803-1809, 2006.
Z.Hao, A.Erbil, and F.Ayazi, “An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations,” Sensors and Actuators A: Physical, vol.109, no.1-2, pp.156-164, 2003.
R.Lifshitz and M.L.Roukes, “Thermoelastic damping in micro-and nanomechanical systems,” Physical review B, vol.61, no.8, p.5600, 2000.
Y.Huang and P.R.Saulson, “Dissipation mechanisms in pendulums and their implications for gravitational wave interferometers,” Review of scientific instruments, vol.69, no.2, pp.544-553, 1998.
S.Kumar and M.Haque, “Reduction of thermo-elastic damping with a secondary elastic field,” Journal of sound and vibration, vol.318, no.3, pp.423-427, 2008.
A.S.Vahdat and G.Rezazadeh, “Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators,” Journal of the Franklin Institute, vol.348, no.4, pp.622-639, 2011.
R.N.Widmer, D.Bischof, J.Jurczyk, M.Michler, J.Schwiedrzik, and J.Michler, “Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching,” Materials & Design, vol.204, p.109670, 2021.
