[en] This paper is dedicated to the physical understanding of electrostatic forces with a one-dimensional reference problem. First a non-dimensional analysis prescribes the kind of assumptions to consider for the electric field model. An analytical study of electro-mechanical coupling is then performed to understand the type
of non-linearity added by electrostatic forces, and static and dynamic analysis are used to define new characteristic parameters. To come closer to more realistic problems, cubic mechanical
stiffness is added to account for the large displacement hypothesis prescribed for certain types of MEMS and damping effects are studied.
Disciplines :
Mechanical engineering
Author, co-author :
Rochus, Véronique ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Introduction to Electromechanical Coupling
Publication date :
2010
Journal title :
Computer and Experimental Simulations in Engineering and Science
