Engineering, computing & technology: Multidisciplinary, general & others
Author, co-author :
Tunon de Lara, Mateo
Chah, Karima
Amez-Droz, Loïc ; Université de Liège - ULiège > Aérospatiale et Mécanique (A&M)
Lambert, Pierre
Collette, Christophe ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Active aerospace structures and advanced mechanical systems
Caucheteur, Christophe
Language :
English
Title :
Production of an optical waveguide in planar glass substrate fabricated with femtoprint
Publication date :
25 May 2022
Journal title :
Proceedings of SPIE: The International Society for Optical Engineering
ISSN :
0277-786X
eISSN :
1996-756X
Publisher :
International Society for Optical Engineering, Bellingham, United States - Washington
Kiyama, Satoshi, et al. "Examination of etching agent and etching mechanism on femtosecond laser microfabrication of channels inside vitreous silica substrates." The Journal of Physical Chemistry C 113.27 11560-11566 (2009).
Fang, Xia, C. R. Liao, and D. N. Wang. "Femtosecond laser fabricated fiber Bragg grating in microfiber for refractive index sensing." Optics letters 35.7, 1007-1009 (2010).
Righini, Giancarlo C., and Andrea Chiappini. "Glass optical waveguides: a review of fabrication techniques." Optical Engineering 53.7,071819 (2014).
Gattass, R. R., & Mazur, E. “Femtosecond laser micromachining in transparent materials”. Nature Photonics, 2(4), 219-225. (2008).
Bellouard, Y., Champion, A., Lenssen, B., Matteucci, M., Schaap, A., Beresna, M., & Lopez, J. “The femtoprint project”. Journal of Laser Micro/Nanoengineering, 7(1), 1-10 (2012).
Pollock, Clifford R., and Michal Lipson. "Coupling between optical sources and waveguides." Integrated Photonics, Springer, Boston, MA, 271-299 (2003).
Miura, K., et al. "Photowritten optical waveguides in various glasses with an ultrashort pulse laser." Applied Physics Letters 71.23, 3329-3331 (1997).
Shah, Lawrence, et al. "Waveguide writing in fused silica with a femtosecond fiber laser at 522 nm and 1 MHz repetition rate." Optics express 13.6, 1999-2006 (2005).
Rajesh Sheeba, and Yves Bellouard. "Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy." Optics Express 18.20, 21490-21497 (2010).
Krol, D. M. “Femtosecond laser modification of glass”. Journal of Non-Crystalline Solids, 354(2-9), 416 424 (2008).
Bado, P., Said, A., Dugan, M., Sosnowski, T., & Wright, S. “Dramatic improvements in waveguide manufacturing with femtosecond lasers”. NFOEC, Dallas (2002).
Glezer, E. N., & Mazur, E. “Ultrafast-laser-driven micro-explosions in transparent materials”. Applied physics letters, 71(7), 882-884 (1997).
Tan, D., Sun, X., & Qiu, J. “Femtosecond laser writing low-loss waveguides in silica glass: highly symmetrical mode field and mechanism of refractive index change”. Optical Materials Express, 11(3), 848-857 (2021).
Zhang, H., Eaton, S. M., & Herman, P. R. “Low-loss Type II waveguide writing in fused silica with single picosecond laser pulses”. Optics Express, 14(11), 4826-4834 (2006).
Eaton, S. M., Zhang, H., Herman, P. R., Yoshino, F., Shah, L., Bovatsek, J., & Arai, A. Y. “Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate”. Optics express, 13(12), 4708-4716 (2005).
Kiyama, Satoshi, et al. "Examination of etching agent and etching mechanism on femtosecond laser microfabrication of channels inside vitreous silica substrates." The Journal of Physical Chemistry C 113.27, 11560-11566 (2009).
Widmer, Remo N., et al. "Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching." Materials & Design 204, 109670 (2021).
Chah, Karima, et al. "Surface plasmon resonance in eccentric femtosecond-laser-induced fiber Bragg gratings." Optics Letters 39.24, 6887-6890 (2014).
