Influence of the geometry of illumination and viewing beams on displacement measurement errors in interferometric metrology

De Veuster, Christophe; Slangen, Pierre; Renotte, Yvon; Berwart, Léon; Lion, Yves

doi:10.1016/S0030-4018(97)00336-2

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Influence of the geometry of illumination and viewing beams on displacement measurement errors in interferometric metrology

De Veuster, Christophe; Slangen, Pierre; Renotte, Yvon et al.

1997 • In Optics Communications, 143, p. 95-101

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https://hdl.handle.net/2268/262702

DOI
10.1016/S0030-4018(97)00336-2

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Keywords :

Optical metrology; Optical interferometry; ESPI

Disciplines :

Physics

Author, co-author :

De Veuster, Christophe; Université de Liège - ULiège > Physique > HOLOLAB

Slangen, Pierre; Ecole Nationale Supérieure des Techniques Industrielles et des Mines d'Alès (France)

Renotte, Yvon ; Université de Liège - ULiège > Département de physique > Optique - Hololab

Berwart, Léon; Université de Liège - ULiège > Physique > HOLOLAB

Lion, Yves ; Université de Liège - ULiège > Physique > HOLOLAB

Language :

English

Title :

Influence of the geometry of illumination and viewing beams on displacement measurement errors in interferometric metrology

Publication date :

1997

Journal title :

Optics Communications

ISSN :

0030-4018

Publisher :

Elsevier, Netherlands

Volume :

143

Pages :

95-101

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi :

since 23 August 2021

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Bibliography

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K. Hibino, B.F. Oreb, D.I. Farrant, K.G. Larkin, J. Opt. Soc. Am. A 12 (1995) 761.
M. Sjödahl, L.R. Benckert, Appl. Optics 33 (1994) 7461.
P.K. Rastogi, Ed., Holographic Interferometry: principles and methods, Springer Series in Optical Sciences (Springer, Berlin, 1994).
R. Jones, C. Wykes, Eds., Holographic and Speckle Interferometry, Cambridge Studies in Modern Optics (Cambridge University Press, Cambridge, 1989).
P. Slangen, C. De Veuster, Y. Renotte, L. Berwart, Y. Lion, Opt. Eng. 34 (1995) 3526.