Reference : A Low-Power and Wide-Range MEMS Capacitive Sensors Interface IC Using Pulse-Width Mod...
Scientific journals : Article
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/227784
A Low-Power and Wide-Range MEMS Capacitive Sensors Interface IC Using Pulse-Width Modulation for Biomedical Applications
English
Arefin, M. S. [Department of Electrical and Computer Systems Engineering, Monash University, Melbourne, VIC 3800, Australia]
Redouté, Jean-Michel mailto [Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Yuce, M. R. [Department of Electrical and Computer Systems Engineering, Monash University, Melbourne, VIC 3800, Australia]
2016
IEEE Sensors Journal
Institute of Electrical and Electronics Engineers Inc.
16
17
6745-6754
Yes
International
1530437X
[en] Interface circuit ; Capacitance ; Capacitance measurement ; Capacitive sensors ; Comparator circuits ; Comparators (optical) ; Counting circuits ; Digital control systems ; Electric inverters ; Electric machine control ; High pass filters ; Integrated circuits ; Low power electronics ; Medical applications ; Microelectronics ; Modulation ; Oscillators (electronic) ; Passive filters ; Pressure sensors ; Pulse width modulation ; Reconfigurable hardware ; Tuning ; Voltage control ; Biomedical applications ; Capacitive pressure sensors ; Differential capacitance ; Digital control signals ; Interface circuits ; Lower-power consumption ; Mems capacitive sensors ; Time based ; Pulse generators
[en] This paper presents a low power, compact, and low-complexity pulse-width modulation-based interface circuit for capacitive MEMS sensors. The circuit is designed using a ring oscillator, an RC controlled pulse generator with high-pass filter, and a self-tuning inverter comparator to produce pulse width, which is proportional to differential capacitance and independent of parasitic capacitance. The high-pass filter is utilized to reduce the bandwidth of noise sources. The circuit provides control over sensitivity, dynamic range, and nominal point for the capacitance measurement by selecting controlling parameters, such as resistance of the RC pulse generator, biasing voltage of the self-tuning inverter comparator, and a reference capacitor using digital control signals. The circuit provides high linearity with higher sensitivity and lower power consumption. The sensitivity of the circuit is 0.56 to 3.62 μs/pF depending on the controlling parameters. The maximum dynamic sensing range is 22 to 270 pF depending on the controlling parameters. The interface circuit is designed and fabricated using the United Microelectronics Corporation (UMC) 0.18-μm CMOS technology. It occupies an active area of 0.17 mm2 and consumes 98 μW. A capacitive MEMS-based pressure sensor is also connected with the interface circuit to measure pressure throughout the digestive tract. The sensitivity for pressure from 101 to 200 kPa is 60 ns/kPa and from 50 to 101 kPa is 23 ns/kPa. © 2001-2012 IEEE.
http://hdl.handle.net/2268/227784
10.1109/JSEN.2016.2587668

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