[en] Diffraction grating replication realized by solvent vapor assisted imprinting
lithography (SVAIL) process is here reported. Diffraction efficiency was monitored in real time. The monitoring indicated the variation of diffraction efficiency during the evolution of SVAIL process. According to initial value of monitored diffraction efficiency and to theoretical simulations of diffraction efficiency for various steps of SVAIL process, the value of diffraction efficiency for optimal replication was deduced; and the process could be stopped at that value.
Disciplines :
Physics
Author, co-author :
Horugavye, Georges ; Université de Liège - ULiège > Doct. sc. (physique - Bologne)
Sabushimike, Bernard ; Université de Liège - ULiège > Form. doct. sc. (sc. spatiales - paysage)
Habraken, Serge ; Université de Liège - ULiège > Département de physique > Optique - Hololab
Language :
English
Title :
Control of Solvent Vapor Assisted Imprinting Lithography Process by Real Time Monitoring of Grating Diffraction Efficiency
Publication date :
14 May 2018
Journal title :
International Journal of Nanotechnology and Applications
This website uses cookies to improve user experience. Read more
Save & Close
Accept all
Decline all
Show detailsHide details
Cookie declaration
About cookies
Strictly necessary
Performance
Strictly necessary cookies allow core website functionality such as user login and account management. The website cannot be used properly without strictly necessary cookies.
This cookie is used by Cookie-Script.com service to remember visitor cookie consent preferences. It is necessary for Cookie-Script.com cookie banner to work properly.
Performance cookies are used to see how visitors use the website, eg. analytics cookies. Those cookies cannot be used to directly identify a certain visitor.
Used to store the attribution information, the referrer initially used to visit the website
Cookies are small text files that are placed on your computer by websites that you visit. Websites use cookies to help users navigate efficiently and perform certain functions. Cookies that are required for the website to operate properly are allowed to be set without your permission. All other cookies need to be approved before they can be set in the browser.
You can change your consent to cookie usage at any time on our Privacy Policy page.
