[en] Electromigration has evolved from an important cause of failure in electronic devices to an appealing
method, capable of modifying the material properties and geometry of nanodevices. Although
this technique has been successfully used by researchers to investigate low dimensional systems and
nanoscale objects, its low controllability remains a serious limitation. This is in part due to the inherent
stochastic nature of the process, but also due to the inappropriate identification of the relevant control
parameters. In this study, we identify a suitable process variable and propose a novel control algorithm
that enhances the controllability and, at the same time, minimizes the intervention of an operator.
As a consequence, the algorithm facilitates the application of electromigration to systems that require
exceptional control of, for example, the width of a narrow junction. It is demonstrated that the electromigration
rate can be stabilized on pre-set values, which eventually defines the final geometry of
the electromigrated structures.
Disciplines :
Physics
Author, co-author :
Zharinov, Vyacheslav; Katholieke Universiteit Leuven - KUL > Physics and Astronomy > Nanoscale Superconductivity and Magnetism
Baumans, Xavier ; Université de Liège - ULiège > Département de physique > Physique expérimentale des matériaux nanostructurés
Silhanek, Alejandro ; Université de Liège - ULiège > Département de physique > Physique expérimentale des matériaux nanostructurés
Janssens, Ewald; Katholieke Universiteit Leuven - KUL > Physics and Astronomy
Van de Vondel, Joris; Katholieke Universiteit Leuven - KUL > Physics and Astronomy > Nanoscale Superconductivity and Magnetism
Language :
English
Title :
Controlled electromigration protocol revised
Publication date :
11 April 2018
Journal title :
Review of Scientific Instruments
ISSN :
0034-6748
eISSN :
1089-7623
Publisher :
American Institute of Physics, United States - New York
Volume :
89
Pages :
043904
Peer reviewed :
Peer Reviewed verified by ORBi
Funders :
F.R.S.-FNRS - Fonds de la Recherche Scientifique [BE] COST- NanoCoHybri
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