Steady-State, Nonlinear Analysis of Large Arrays of Electrically Actuated Micromembranes Vibrating in a Fluid

Halbach, Alexandre; Geuzaine, Christophe

doi:10.1007/s00366-017-0560-8

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Steady-State, Nonlinear Analysis of Large Arrays of Electrically Actuated Micromembranes Vibrating in a Fluid

Halbach, Alexandre; Geuzaine, Christophe

2018 • In Engineering with Computers

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https://hdl.handle.net/2268/216148

DOI
10.1007/s00366-017-0560-8

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Keywords :

multiharmonic; nonlinear; cmut; mems; finite element; multiphysic; domain decomposition

Abstract :

[en] This paper describes a robust and efficient method to obtain the steady-state, nonlinear behaviour of large arrays of electrically actuated micromembranes vibrating in a fluid. The nonlinear electromechanical behavior and the multiple vibration harmonics it creates are fully taken into account thanks to a multiharmonic finite element formulation, generated automatically using symbolic calculation. A domain decomposition method allows to consider large arrays of micromembranes by efficiently distributing the computational cost on parallel computers. Two- and three- dimensional examples highlight the main properties of the proposed method.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Halbach, Alexandre ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Dép. d'électric., électron. et informat. (Inst.Montefiore)

Geuzaine, Christophe ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)

Language :

English

Title :

Steady-State, Nonlinear Analysis of Large Arrays of Electrically Actuated Micromembranes Vibrating in a Fluid

Publication date :

2018

Journal title :

Engineering with Computers

ISSN :

0177-0667

eISSN :

1435-5663

Publisher :

Springer, New York, United States - New York

Peer reviewed :

Peer Reviewed verified by ORBi

Tags :

CÉCI : Consortium des Équipements de Calcul Intensif

Available on ORBi :

since 17 November 2017

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