Finite element analysis; Boundary-elements methods
Abstract :
[en] This paper deals with the coupled mechanical-electrostatic analysis of a shunt capacitive MEMS switch. The mechanical and electrostatic parts of the problem are modelled by the FE and BE methods, respectively. The fast multipole method is applied to reduce the storage requirements and the computational cost of the BE electrostatic model An adaptive truncation expansion of the 3D Laplace Green function is employed The strong interaction between the mechanical and electrostatic systems is considered iteratively.
Disciplines :
Electrical & electronics engineering
Author, co-author :
V Sabariego, Ruth ; Université de Liège - ULiège > Department of Electrical Engineering and Computer Science > Applied Electricity (ELAP)
Gyselinck, Johan; Université de Liège - ULiège > Deparment of Electrical Engineering and Computer Science > Applied Electricity (ELAP)
Dular, Patrick ; Université de Liège - ULiège > Department of Electrical Engineering and Computer Science > Applied Electricity (ELAP)
De Coster, Jeroen; Katholieke Universiteit Leuven - KUL > Department of Electrical Engineering (ESAT-MICAS)
Henrotte, François; Katholieke Universiteit Leuven - KUL > Department of Electrical Engineering (ESAT-ELECTA)
Hameyer, Kay; Katholieke Universiteit Leuven - KUL > Department of Electrical Engineering (ESAT-ELECTA)
Language :
English
Title :
Coupled mechanical-electrostatic FE-BE analysis with FMM acceleration
Publication date :
2004
Journal title :
COMPEL
ISSN :
0332-1649
eISSN :
2054-5606
Publisher :
Emerald Group Publishing Limited, Bradford, United Kingdom
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