Reference : Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/192176
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH
English
Moktadir, Zakaria [> >]
Prakash, G. V. [> >]
Koukharenko, Elena [> >]
Gollasch, Carsten O. [> >]
Bagnall, D. M. [> >]
Kraft, Michaël mailto [Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Hinds, Edward A. [> >]
Baumberg, J. J. [> >]
2004
Conference on Lasers and Electro-Optics (CLEO)
OSA trends in optics and photonics : TOPS
Yes
Yes
International
1-55752-777-6
Proc. Lasers and Electro-optics (CLEO/IQEC)
2004
San Francisco
CA
[en] We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.
http://hdl.handle.net/2268/192176
http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=1360838
2: Postdeadline papers

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