[en] We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Moktadir, Zakaria
Prakash, G. V.
Koukharenko, Elena
Gollasch, Carsten O.
Bagnall, D. M.
Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Hinds, Edward A.
Baumberg, J. J.
Language :
English
Title :
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH
