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Relaxation fabrication tolerance of micromachined inertial sensors using high order electromechanical sigma-delta modulators
Dong, Yufeng; Kraft, Michaël; Redman-White, William
2006 • In The 17th Micromechanics Europe Workshop, MME'06
Peer reviewed
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https://hdl.handle.net/2268/192160
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Dong, Yufeng
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Redman-White, William
Language :
English
Title :
Relaxation fabrication tolerance of micromachined inertial sensors using high order electromechanical sigma-delta modulators
Publication date :
September 2006
Event name :
Proc. MME 2006 Conference
Event place :
United Kingdom
Event date :
September 2006
By request :
Yes
Audience :
International
Main work title :
The 17th Micromechanics Europe Workshop, MME'06
Pages :
pp.33-36
Peer reviewed :
Peer reviewed
Commentary :
33--36
Available on ORBi :
since 25 January 2016

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