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A feasibility study for a self-oscillating loop for a three degree of freedom coupled MEMS resonator force sensor
Zhao, C; Wood, GS; Pu, SH et al.
2015In Proc. Eurosensors MP-L01
Peer reviewed
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Zhao, C
Wood, GS
Pu, SH
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
A feasibility study for a self-oscillating loop for a three degree of freedom coupled MEMS resonator force sensor
Publication date :
September 2015
Event name :
Proc. Eurosensors MP-L01
Event place :
Freiburg, Austria
Event date :
September 2015
By request :
Yes
Audience :
International
Main work title :
Proc. Eurosensors MP-L01
Peer reviewed :
Peer reviewed
Available on ORBi :
since 25 January 2016

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