No full text
Paper published in a book (Scientific congresses and symposiums)
Sigma-delta modulator based control systems for MEMS gyroscopes
Kraft, Michaël; Ding, Haitao
2009In 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Peer reviewed
 

Files


Full Text
No document available.

Send to



Details



Abstract :
[en] In this paper a review is presented about recent developments of using sigma-delta modulator (SDM) control systems for micromachined, capacitive vibratory rate MEMS gyroscopes. The design choices, their benefits and disadvantages are briefly discussed. As the most promising control system, a higher order, band-pass SDM is identified since it achieves high quantization noise shaping at a relatively low sampling frequency, in addition to the normal closed loop, force feedback control advantages such as improved bandwidth, linearity and dynamic range. Previous work applied this type of control system to gyroscopes with a relatively small proof mass. Here, results are presented applying the approach to a comparatively large, bulk-micromachined gyroscope sensing element, which has the potential to result in a high performance sensor. System level simulations are presented illustrating the benefits of the approach.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Ding, Haitao
Language :
English
Title :
Sigma-delta modulator based control systems for MEMS gyroscopes
Publication date :
January 2009
Event name :
Proc. IEEE NEMS
Event place :
Shenzhen, China
Event date :
January 2009
Audience :
International
Main work title :
2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Publisher :
IEEE, Piscataway and NJ, United States - New Jersey
ISBN/EAN :
978-1-4244-4629-2
Pages :
41-46
Peer reviewed :
Peer reviewed
Commentary :
Vol. 1
Available on ORBi :
since 20 January 2016

Statistics


Number of views
44 (2 by ULiège)
Number of downloads
0 (0 by ULiège)

Scopus citations®
 
3
Scopus citations®
without self-citations
3
OpenCitations
 
2

Bibliography


Similar publications



Contact ORBi