Micromachined gyroscopes based on a rotating mechanically unconstrained proof mass

Kraft, Michaël; Damrongsak, Badin

doi:10.1109/ICSENS.2010.5690984

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Micromachined gyroscopes based on a rotating mechanically unconstrained proof mass

Kraft, Michaël; Damrongsak, Badin

2010 • In IEEE Sensors 2010

Peer reviewed

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https://hdl.handle.net/2268/191719

DOI
10.1109/ICSENS.2010.5690984

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Abstract :

[en] This paper describes the state-of-the-art of micromachined gyroscopes based on a spinning, electrostatically suspended rotor as proof mass. This approach has numerous advantages over the prevailing approach for MEMS gyroscopes relying on a two degree of freedom vibrating structure and Coriolis force coupling between two modes. The key benefits of a gyroscope with a suspended rotor are its higher scale factor, the absence of mode coupling issues such as quadrature error and that there is no need to tune modal resonant frequencies. The paper reviews the literature on gyroscopes with a spinning, mechanically unconstrained rotor and then reports on the authors' effort to develop such a gyroscope.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Damrongsak, Badin

Language :

English

Title :

Micromachined gyroscopes based on a rotating mechanically unconstrained proof mass

Publication date :

November 2010

Event name :

Proc. IEEE Sensors Conference

Event place :

Hawaii, United States - Hawaii

Event date :

November 2010

Audience :

International

Main work title :

IEEE Sensors 2010

Publisher :

IEEE, Piscataway and NJ, United States - New Jersey

ISBN/EAN :

978-1-4244-8170-5

Peer reviewed :

Peer reviewed

Additional URL :

http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=5690984

Commentary :

23--28

Available on ORBi :

since 20 January 2016

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