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Design and analysis of MEMS step up voltage converters
Gleeson, R.; Kraft, Michaël; White, Neil
2012In IEEE Sensors 2012
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Abstract :
[en] This paper presents a comprehensive analysis of voltage step-up converters for energy harvesting and other low-power applications. The step-up operation is based on isolating the charge of a mechanically variable capacitor and varying the gap between the electrodes by an appropriate method of providing an actuation force i.e. electrostatic or physical. Two devices are presented; a bi-stable device and a resonant device, specifically designed for solar and vibration energy harvesting respectively. The bi-stable device introduces a separate electrostatic actuator element to manipulate the variable capacitor electrodes, whereas, in the case of the resonant device, ambient vibrations provide the necessary actuation force. System-level Multisim models have been developed and verified using 3D FEM Coventorware and MEMS+ simulations. The devices were then fabricated using a dicing-free Silicon-on-Insulator (SOI) process developed at the Southampton Nanofabrication Centre.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Gleeson, R.
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
White, Neil
Language :
English
Title :
Design and analysis of MEMS step up voltage converters
Publication date :
November 2012
Event name :
IEEE Sensors Conference
Event date :
Nov 2012
Audience :
International
Main work title :
IEEE Sensors 2012
Publisher :
IEEE
ISBN/EAN :
978-1-4577-1766-6
Pages :
1-4
Peer reviewed :
Peer reviewed
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since 01 December 2015

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