Photorefractive holographic camera for monitoring deformations of MEMS

Georges, Marc; Thizy, Cédric

doi:10.1117/1.JMM.14.4.041301

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Photorefractive holographic camera for monitoring deformations of MEMS

Georges, Marc; Thizy, Cédric

2015 • In Journal of Micro/Nanolithography, MEMS, and MOEMS, 14 (4), p. 041301

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https://hdl.handle.net/2268/184632

DOI
10.1117/1.JMM.14.4.041301

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Keywords :

holographic interferometry; photorefractive crystals; micromechanical structures; MEMS

Abstract :

[en] We present the development of a holographic interferometer based on dynamic hologram recording with photorefractive crystals of the sillenite family and which is adapted for the observation of MEMS. A compact portable system was already presented in the past and used in various metrology and nondestructive applications on large scattering objects. It was emphasized the great versatility of the instrument which allows high resolution measurements. Here we show the development and achievement of an optical module which can be easily interfaced on the basic instrument, allowing small specular objects observation. Results of deformation of electrically actuated MEMS are shown.

Disciplines :

Physics

Author, co-author :

Georges, Marc ; Université de Liège > CSL (Centre Spatial de Liège)

Thizy, Cédric ; Université de Liège > CSL (Centre Spatial de Liège)

Language :

English

Title :

Photorefractive holographic camera for monitoring deformations of MEMS

Publication date :

October 2015

Journal title :

Journal of Micro/Nanolithography, MEMS, and MOEMS

ISSN :

1932-5150

eISSN :

1932-5134

Publisher :

Society of Photo-Optical Instrumentation Engineers (SPIE), Bellingham, United States

Volume :

Issue :

Pages :

041301

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi :

since 10 August 2015

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