[en] We present the development of a holographic interferometer based on dynamic hologram recording with photorefractive crystals of the sillenite family and which is adapted for the observation of MEMS. A compact portable system was already presented in the past and used in various metrology and nondestructive applications on large scattering objects. It was emphasized the great versatility of the instrument which allows high resolution measurements. Here we show the development and achievement of an optical module which can be easily interfaced on the basic instrument, allowing small specular objects observation. Results of deformation of electrically actuated MEMS are shown.
Disciplines :
Physics
Author, co-author :
Georges, Marc ; Université de Liège > CSL (Centre Spatial de Liège)
Thizy, Cédric ; Université de Liège > CSL (Centre Spatial de Liège)
Language :
English
Title :
Photorefractive holographic camera for monitoring deformations of MEMS
Publication date :
October 2015
Journal title :
Journal of Micro/Nanolithography, MEMS, and MOEMS
ISSN :
1932-5150
eISSN :
1932-5134
Publisher :
Society of Photo-Optical Instrumentation Engineers (SPIE), Bellingham, United States
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