Reference : Two-degree-of-freedom capacitive MEMS velocity sensor
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/183543
Two-degree-of-freedom capacitive MEMS velocity sensor
English
Alshehri, A []
Kraft, Michael mailto [Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Gardonio, P []
Sep-2010
Proceedings of "MME 2010 Conference, The Netherlands"
Yes
International
MME 2010 Conference
Septembre 2010
Enschede
Netherlands
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/183543

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