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Two-degree-of-freedom capacitive MEMS velocity sensor
Alshehri, A; Kraft, Michael; Gardonio, P
2010In Proceedings of "MME 2010 Conference, The Netherlands"
Peer reviewed
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Alshehri, A
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Gardonio, P
Language :
English
Title :
Two-degree-of-freedom capacitive MEMS velocity sensor
Publication date :
September 2010
Event name :
MME 2010 Conference
Event place :
Enschede, Netherlands
Event date :
Septembre 2010
Audience :
International
Main work title :
Proceedings of "MME 2010 Conference, The Netherlands"
Peer reviewed :
Peer reviewed
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since 02 July 2015

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