Reference : Two-degree of freedom capacitive MEMS velocity sensor with two coupled electrically i...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/183409
Two-degree of freedom capacitive MEMS velocity sensor with two coupled electrically isolated mass-spring-damper systems
English
Alshehri, A []
Almutairi, B []
Gardonio, P []
Kraft, Michael mailto [Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Nov-2014
Proceedings of "IEEE Sensor Conference : Espagne - Novembre 2014"
Yes
International
IEEE Sensors Conference
Novembre 2014
Valencia
Spain
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/183409

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