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Two-degree of freedom capacitive MEMS velocity sensor with two coupled electrically isolated mass-spring-damper systems
Alshehri, A; Almutairi, B; Gardonio, P et al.
2014In Proceedings of "IEEE Sensor Conference : Espagne - Novembre 2014"
Peer reviewed
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Alshehri, A
Almutairi, B
Gardonio, P
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Two-degree of freedom capacitive MEMS velocity sensor with two coupled electrically isolated mass-spring-damper systems
Publication date :
November 2014
Event name :
IEEE Sensors Conference
Event place :
Valencia, Spain
Event date :
Novembre 2014
Audience :
International
Main work title :
Proceedings of "IEEE Sensor Conference : Espagne - Novembre 2014"
Peer reviewed :
Peer reviewed
Available on ORBi :
since 30 June 2015

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