Reference : Development of an implantable integrated MEMS pressure sensor using polyimide epoxy c...
Scientific congresses and symposiums : Paper published in a book
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/183404
Development of an implantable integrated MEMS pressure sensor using polyimide epoxy composite and Atomic Layer Deposition for encapsulation
English
Gembaczka, P []
Görtz, M []
Kraft, Michael mailto [Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés >]
Oct-2014
Proceedings of "48th DGBMT Annual Conf. : Hannover, Germany Octobre 2014"
Yes
International
48th DGBMT Annual Conference
Octobre 2014
Hannover
Germany
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/183404

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