[en] This paper examines the possibility of constructing deformable mirrors for adaptive optics with a large number of degrees of freedom from silicon wafers with bimorph piezoelectric actuation. The mirror may be used on its own, or as a segment of a larger mirror. The typical size of one segment is 100to200mm ; the production process relies on silicon wafers and thick film piezoelectric material deposition technology; it is able to lead to an actuation pitch of the order of 5mm , and the manufacturing costs appear to grow only slowly with the number of degrees of freedom in the adaptive optics.
Disciplines :
Aerospace & aeronautics engineering
Author, co-author :
Rodrigues, Goncalo; Université Libre de Bruxelles - ULB
Bastaits, Renaud; Université Libre de Bruxelles - ULB
Roose, Stéphane ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Stockman, Yvan ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Gebhart, Sylvia; Fraunhofer Institut für Keramische Technologien und Systeme
Schoenecker, Andreas; Fraunhofer Institut für Keramische Technologien und Systeme
Villon, Pierre
Language :
English
Title :
Modular bimorph mirrors for adaptive optics
Publication date :
20 March 2009
Journal title :
Optical Engineering
ISSN :
0091-3286
eISSN :
1560-2303
Publisher :
International Society of Optical Engineering, Bellingham, United States - Washington
R., Arsenault, R., Biasi, D., Gallieni, A., Riccardi, P., Lazzarini, N., Hubin, E., Fedrigo, R., Donaldson, S., Oberti, S., Stroebele, R., Conzelmann, and M., Duchateau, " A deformable secondary mirror for the VLT, " in, Advances in Adaptive Optics II D. Bonaccini Calia, B. L. Ellerbroek, and R. Ragazzoni, Eds., Proc. SPIE, 6272, 62720V (2006). spi PSISDG 0277-786X
N. N., Hubin, " Adaptive optics status and roadmap at ESO, " in, Advances in Adaptive Optics, D. Bonaccini Calia, B. L. Ellerbroek, and R. Ragazzoni, Eds., Proc. SPIE, 5490, 195-206 (2004). spi PSISDG 0277-786X
D. T., Gavel, " Adaptive optics control strategies for extremely large telescopes, " in, Adaptive Optics Systems and Technology II, R. K. Tyson, D. Bonaccini, and M. C. Roggemann, Eds., Proc. SPIE, 4494, 215-220 (2002). spi PSISDG 0277-786X
G. M., Dai, " Modal compensation of atmospheric turbulence with the use of Zernike polynomials and Karhunen-Loève functions, ", J. Opt. Soc. Am. A, 12, 2182-2193 (1995). joa JOAOD6 0740-3232
G. M., Dai, " Modal wave-front reconstruction with Zernike polynomials and Karhunen-Loève functions, ", J. Opt. Soc. Am. A, 13, 1218-1225 (1996). joa JOAOD6 0740-3232
M. C., Roggemann and B., Welsh, in, Imaging through Turbulence, CRC Press (1996).
J. W., Hardy, J. E., Lefebvre, and C. L., Koliopoulos, " Real-time atmospheric compensation, ", J. Opt. Soc. Am., 67, 360-369 (1977). jox JOSAAH 0030-3941
F., Forbes, " Bimorph PZT active mirror, " in, Active Telescope Systems, Proc. SPIE, 1114, 146-151 (1989). spi PSISDG 0277-786X
J.-P., Gaffard, P., Jagourel, and P., Gigan, " Adaptive optics: description of available components at Laserdot, " in, Adaptive Optics in Astronomy, M. A. Ealey and F. Merkle, Eds., Proc. SPIE, 2201, 688-702 (1994). spi PSISDG 0277-786X
G., Vdovin and P. M., Sarro, " Flexible mirror micromachined in silicon, ", Appl. Opt., 34, 2968-2972 (1995). apo APOPAI 0003-6935
D., Dagel, W., Cowan, O., Spahn, G., Grossetete, A., Grine, M., Shaw, P., Resnick, and B., Jokiel, Jr., " Large-stroke MEMS deformable mirrors for adaptive optics, ", J. Microelectromech. Syst., 15, 572-583 (2006). jiy JMIYET 1057-7157 10.1109/JMEMS.2006.876794
R., Biasi and D., Gallieni, " MMT adaptive secondary prototype development, " in, Adaptive Optical System Technologies, D. Bonaccini and R. K. Tyson, Eds., Proc. SPIE, 3353, 858-863 (1998). spi PSISDG 0277-786X
J. K., Dürr, R., Honke, M., von Alberti, and R., Sippel, " Development and manufacture of an adaptive lightweight mirror for space application, ", Smart Mater. Struct., 12, 1005-1016 (2003). smr SMSTER 0964-1726 10.1088/0964-1726/12/6/020
A., Preumont, Mechatronics - Dynamics of Electromechanical and Piezoelectric Systems, Springer (2006).
V., Piefort, " Finite element modeling of piezoelectric active structures, ", PhD, Thesis, Univ. Libre de Bruxelles (2001).
E., Gebhardt, T., Rödig, U., Partsch, and A., Schönecker, " Development of micro-integrated sensors and actuators based on PZT thick films, " in, Proc. 16th Eur. Microelectronics and Packaging Conf. & Exhibition EMPC 2007, pp. 177-181 (2007).
S., Gebhardt, L., Seffner, F., Schlenkrich, and A., Schönecker, " PZT thick films for sensor and actuator applications, ", J. Eur. Ceram. Soc., 27, 4177-4180 (2007). jeu JECSER 0955-2219
E. M., Ellis, " Low-cost bimorph mirrors in adaptive optics, ", PhD, Thesis, Imperial College, Univ. of London (1999).
G., Chanan, D. G., MacMartin, J., Nelson, and T., Mast, " Control and alignment of segmented-mirror telescopes: matrices, modes, and error propagation, ", Appl. Opt., 43, 1223-1232 (2004). apo APOPAI 0003-6935 10.1364/AO.43.001223
G. A., Chanan, M., Troy, and C. M., Ohara, " Phasing the primary mirror segments of the Keck telescopes: a comparison of different techniques, " in, Optical Design, Materials, Fabrication, and Maintenance, P. Dierickx, Ed., Proc. SPIE, 4003, 188-202 (2000). spi PSISDG 0277-786X
