[en] This paper examines the possibility of constructing deformable mirrors for adaptive optics with a large number of degrees of freedom from silicon wafers with bimorph piezoelectric actuation. The mirror may be used on its own, or as a segment of a larger mirror. The typical size of one segment is 100to200mm ; the production process relies on silicon wafers and thick film piezoelectric material deposition technology; it is able to lead to an actuation pitch of the order of 5mm , and the manufacturing costs appear to grow only slowly with the number of degrees of freedom in the adaptive optics.
Disciplines :
Aerospace & aeronautics engineering
Author, co-author :
Rodrigues, Goncalo; Université Libre de Bruxelles - ULB
Bastaits, Renaud; Université Libre de Bruxelles - ULB
Roose, Stéphane ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Stockman, Yvan ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Gebhart, Sylvia; Fraunhofer Institut für Keramische Technologien und Systeme
Schoenecker, Andreas; Fraunhofer Institut für Keramische Technologien und Systeme
Villon, Pierre
Language :
English
Title :
Modular bimorph mirrors for adaptive optics
Publication date :
20 March 2009
Journal title :
Optical Engineering
ISSN :
0091-3286
eISSN :
1560-2303
Publisher :
International Society of Optical Engineering, Bellingham, United States - Washington
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