Paper published in a book (Scientific congresses and symposiums)
Poly-SiGe-based MEMS Xylophone Bar Magnetometer
Rochus, Véronique; Jansen, R.; Tilmans, H. A. C. et al.
2012In IEEE SENSORS 2012
Peer reviewed
 

Files


Full Text
PID2498261.pdf
Author preprint (687.1 kB)
Download

All documents in ORBi are protected by a user license.

Send to



Details



Keywords :
MEMS
Abstract :
[en] This paper presents the design, fabrication and preliminary characterization of highly sensitive MEMS-based Xylophone Bar Magnetometers (XBMs) realized in imec’s poly-SiGe MEMS technology. Key for our Lorentz force driven capacitively sensed resonant sensor are the combination of reasonably high Q-factor and conductivity of imec’s poly-SiGe, our optimized multiphysics sensor design targeting the maximization of the Q-factor in a wide temperature range as well as our proprietary monolithic above-CMOS integration and packaging schemes. Prototypes 3-axis devices were fabricated and characterized. We present optical vibrometer and electrical S-parameter measurements of XBMs performed in vacuum with a reference magnet at increasing sensor separation. The optical oscillation amplitude is well correlated with the magnetic field amplitude. The electrical 2-port measurements, 1st port as Lorentz force actuator and 2nd port as capacitive sensor, also reproduces the designed magnetic field dependence. This opens the way towards the on-chip integration of small footprint extremely sensitive magnetometers.
Disciplines :
Aerospace & aeronautics engineering
Author, co-author :
Rochus, Véronique
Jansen, R.
Tilmans, H. A. C.
Rottenberg, X.
Chen, C.
Ranvier, S.
Lamy, Hervé ;  Université de Liège - ULiège > Département d'astrophys., géophysique et océanographie (AGO) > Département d'astrophys., géophysique et océanographie (AGO)
Rochus, Pierre  ;  Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Language :
English
Title :
Poly-SiGe-based MEMS Xylophone Bar Magnetometer
Publication date :
October 2012
Event name :
IEEE SENSORS 2012
Event date :
28-31 October 2012 in Taipei
Audience :
International
Main work title :
IEEE SENSORS 2012
Peer reviewed :
Peer reviewed
Available on ORBi :
since 23 August 2012

Statistics


Number of views
90 (11 by ULiège)
Number of downloads
382 (5 by ULiège)

Scopus citations®
 
9
Scopus citations®
without self-citations
4
OpenCitations
 
7

Bibliography


Similar publications



Contact ORBi