Paper published in a book (Scientific congresses and symposiums)
Low temperature assembly method of microfluidic bio-molecules detection device
Van Loo, Stéphanie; Stoukatch, Serguei; Van Overstraeten-Schlögel, Nancyet al.
2012 • In Suga, Tadatomo; Takagi, Hideki; Higurashi, Heiji (Eds.) 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012)
bio-packaging; microfluidics; low temperature assembly; biocompatibility
Abstract :
[en] We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation.
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