Finite Element Method, Fringing Field Effects, Electrostatic Forces, Capacitances, Electrostatic MEMS
Abstract :
[en] The numerical models describing the behaviour of electrostatically actuated microsystems often disregard fringing fields. However, taking fringing fields into account is crucial for an accurate computation of the electrostatic forces. In this work, the finite element method is applied for modeling electrostatic actuators. The electrostatic force distribution is obtained by locally applying the virtual work method. A micro-beam and a comb drive are considered as test cases. The impact of the fringing field effects on the accurate computation of electrostatic forces and capacitances is shown through 2D and 3D parametric studies.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Boutaayamou, Mohamed ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)
V Sabariego, Ruth ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)
Dular, Patrick ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)
Language :
English
Title :
Finite element modeling of electrostatic MEMS including the impact of fringing field effects on forces
Publication date :
2008
Journal title :
Sensor Letters
ISSN :
1546-198X
eISSN :
1546-1971
Publisher :
American Scientific Publishers, United States - California