Request a copy

Full Text

3

CITATIONS

3 Total citations

0 Recent citations

0.36 Field Citation Ratio

n/a Relative Citation Ratio

publications

0

supporting

0

mentioning

0

contrasting

0

Smart Citations

0

0

0

0

Citing PublicationsSupportingMentioningContrasting

View Citations

See how this article has been cited at scite.ai

scite shows how a scientific paper has been cited by providing the context of the citation, a classification describing whether it supports, mentions, or contrasts the cited claim, and a label indicating in which section the citation was made.

• S. Senturia, Microsystem Design. Norwell, MA: Kluwer, 2001.
• V. Rochus, "Advantages of an energetic approach to derive the electromechanical coupling," Sensor Lett., vol. 6, no. 1, pp. 88-96, 2008.
• T. Ikeda, Fundamentals of Piezoelectricity. London, U.K.: Oxford Univ. Press, 1996.
• V. Rochus, D. J. Rixen, and J.-C. Golinval, "Monolithic modeling of electro-mechanical coupling in micro-structures," Int. J. Numer. Methods Eng., vol. 65/4, pp. 461-493, 2006.
• V. Rochus, E. Lemaire, and C. Geuzaine, "Dual approach for an accurate estimation of pull-in voltage," in Proc. IVth Eur. Conf. Comput. Mechan. (ECCM), 2010.
• V. Rochus and C. Geuzaine, "A primal/dual approach for the accurate evaluation of the electromechanical coupling in MEMS," Finite Elements Anal. Des., vol. 49, no. 1, Feb. 2012.
• M. Bao and H. Yang, "Squeeze film air damping in MEMS," Sens. Actuators: A, Phys., vol. 136/1, pp. 3-27, 2007.
• T. Veijola, H. Kuisma, J. Lahdenperä, and T. Ryhänen, "Equivalentcircuit model of the squeezed gas film in a silicon accelerometer," Sens. Actuators A, Phys., vol. 48/3, pp. 239-248, 1995.
• Y. J. Yang and C. J. Yu, "Macromodel extraction of gas damping effects for perforated surfaces with arbitrarily-shaped geometries," in Proc. 5th Int. Conf. Model. Simulat. Microsyst., 2002, pp. 178-181.
• T. Veijola and P. Raback, "Methods for solving gas damping problems in perforated microstructures using a 2-D finite-element solver," Sensors, vol. 7, pp. 1069-1090, 2007.
• J. Barroso, O. Bruls, C. Berli, and A. Cardona, "Modelling of the squeeze film air damping in MEMS," in Proc. ENIEF Conf., 2009.
• S. D. A. Hannot and D. J. Rixen, "Building and reducing a three-field finite-element model of a damped electromechanical actuator," J. Microelectromech. Syst., vol. 20, no. 3, pp. 665-675, 2011.
• S. A. Ragon, Z. Gürdal, and L. T. Watson, "A comparison of three algorithms for tracing nonlinear equilibrium paths of structural systems," Int. J. Solids Struct., vol. 39/3, pp. 689-698, 2002.
• V. Rochus, D. J. Rixen, and J. C. Golinval, "Non-conforming element for accurate modelling of MEMS," Finite Elements Anal. Des., vol. 43, pp. 749-756, 2007.
• S. Gutschmidt, V. Rochus, and J. C. Golinval, "Static and dynamic experimental investigations of a micro-electromechanical cantilever in air and vacuum," in Proc. EuroSimE IEEE Conf., 2009.