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Arsenic-doped Ge-spiked monoemitter SiGe:C HBTs by means of low-temperature trisilane based epitaxy

You, Shuzhen; Decoutere, Stefaan; Nguyen, Ngoc Duy et al.

2011 • 7th International Conference on Si Epitaxy and Heterostructures (ICSI-7)

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You_Nguyen_ICSI_2011.pdf

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