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In-line characterization of hetero bipolar transistor base layers and pMOS devices with embedded SiGe by high-resolution x-ray diffraction

Hikavyy, A.; Nguyen, Ngoc Duy; Loo, R. et al.

2008 • 4th International SiGe Technology and Device Meeting (ISTDM)

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Hikavyy_Nguyen_ISTDM_2008.pdf

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