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State-of-the-Art in Mode-Localized MEMS Coupled Resonant Sensors: A Comprehensive Review

Pachkawade, Vinayak Ashok

2021 • In IEEE Sensors Journal, 21 (7), p. 8751-8779

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State-of-the-Art_in_Mode-Localized_MEMS_Coupled_Resonant_Sensors_A_Comprehensive_Review.pdf

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