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Dynamic behavior of smart microelectromechanical systems in industrial applications

Pustan, Marius; Birleanu, Cristian; Dudescu, Corina et al.

2018 • In Nihtianov, Stoyan; Luque, Antonio (Eds.) Smart Sensors and MEMS - Intelligent Sensing Devices and Microsystems for Industrial Applications

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NIHTIANOV_chap 14.pdf

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