No full text
Poster (Scientific congresses and symposiums)
Depth resolution and surface transients in crystalline Silicon at ultra low energies
Goossens, Jozefien; Berghmans, Bart; Franquet, Alexis et al.
200917th International Conference on Secondary Ion Mass Spectrometry (SIMS XVII)
 

Files


Full Text
No document available.

Send to



Details



Keywords :
Ultra low energy secondary ion mass spectrometry; Depth resolution; Surface transient
Disciplines :
Materials science & engineering
Author, co-author :
Goossens, Jozefien;  IMEC
Berghmans, Bart;  IMEC
Franquet, Alexis;  IMEC
Nguyen, Ngoc Duy  ;  IMEC
Delmotte, Joris;  IMEC
Geenen, Luc;  IMEC
Richard, Olivier;  IMEC
Bender, Hugo;  IMEC
Vandervorst, Wilfried;  IMEC
Language :
English
Title :
Depth resolution and surface transients in crystalline Silicon at ultra low energies
Publication date :
2009
Event name :
17th International Conference on Secondary Ion Mass Spectrometry (SIMS XVII)
Event organizer :
Joe Gardella, Leo Lau and Rana Sodhi
Event place :
Toronto, Canada
Event date :
14-18/9/2009
Audience :
International
Additional URL :
Available on ORBi :
since 13 August 2010

Statistics


Number of views
57 (0 by ULiège)
Number of downloads
0 (0 by ULiège)

Bibliography


Similar publications



Contact ORBi