Depth resolution and surface transients in crystalline Silicon at ultra low energies

Goossens, Jozefien; Berghmans, Bart; Franquet, Alexis; Nguyen, Ngoc Duy; Delmotte, Joris; Geenen, Luc; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried

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Poster (Scientific congresses and symposiums)

Depth resolution and surface transients in crystalline Silicon at ultra low energies

Goossens, Jozefien; Berghmans, Bart; Franquet, Alexis et al.

2009 • 17th International Conference on Secondary Ion Mass Spectrometry (SIMS XVII)

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Keywords :

Ultra low energy secondary ion mass spectrometry; Depth resolution; Surface transient

Disciplines :

Materials science & engineering

Author, co-author :

Goossens, Jozefien; IMEC

Berghmans, Bart; IMEC

Franquet, Alexis; IMEC

Nguyen, Ngoc Duy ; IMEC

Delmotte, Joris; IMEC

Geenen, Luc; IMEC

Richard, Olivier; IMEC

Bender, Hugo; IMEC

Vandervorst, Wilfried; IMEC

Language :

English

Title :

Depth resolution and surface transients in crystalline Silicon at ultra low energies

Publication date :

2009

Event name :

17th International Conference on Secondary Ion Mass Spectrometry (SIMS XVII)

Event organizer :

Joe Gardella, Leo Lau and Rana Sodhi

Event place :

Toronto, Canada

Event date :

14-18/9/2009

Audience :

International

Additional URL :

http://www.simsxvii.org/

Available on ORBi :

since 13 August 2010

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