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Stiction Failure in Microswitches Due to Elasto-Plastic Adhesive Contacts
Wu, Ling; Golinval, Jean-Claude; Noels, Ludovic
2013In Shaw, Gordon; Prorok, Bart; Starman, LaVern (Eds.) MEMS and Nanotechnology, Volume 6

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2012_SEM_MEMS.pdf

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